A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE

MA MING-HSIU; YAO WEI; EAI KUEI-PEING

Chinese Physics C> 1978, Vol. 2> Issue(6) : 544-549

A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE

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Abstract：
This article describes a new type of radio-frequency metal ion source, which can be operated with gases, liquids and solids. The operating temperature of the ion source may reach 1000℃. Therefore we can extract ion beams of a considerable number of the elements including metal. At present, the ion beams of Al⁺, Mg⁺, Fe⁺, Cr⁺, Zn⁺, In⁺, Ag⁺, Cd⁺, Sn⁺, Sm⁺, Hg⁺, S⁺, P⁺, As⁺, Se⁺, Te⁺, etc. have been extracted. The total beam current ranges from several hundred microamperes to the order of milliamperes. The useful fraction of ion in total beam is 70—90%. The life of the source ranges from 40 to more than 100 hours.The basic structure and operating characteristics of the source are mainly discussed in this paper.

References

[1]	A. Septier, "Focusing of Charged Particles",(Academic Press, New Yark, 1967), Vol. II.[2] J. Y. Wada, and H. Heil, "Proceedings of the Seventh International Conference on Pheno-mena in Ionized gases", (belgrade, 1965) Vol. III.[3] J. H. Freeman and G. Sidenivs, Nucl. Instr. Methods, 107 (1973), 3.

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MA MING-HSIU, YAO WEI and EAI KUEI-PEING. A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE[J]. Chinese Physics C, 1978, 2(6): 544-549.

MA MING-HSIU, YAO WEI and EAI KUEI-PEING. A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE[J]. Chinese Physics C, 1978, 2(6): 544-549. shu

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Received: 1978-03-23
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE

Received Date: 1978-03-23
Accepted Date: 1900-01-01
Available Online: 1978-12-05

Abstract: This article describes a new type of radio-frequency metal ion source, which can be operated with gases, liquids and solids. The operating temperature of the ion source may reach 1000℃. Therefore we can extract ion beams of a considerable number of the elements including metal. At present, the ion beams of Al⁺, Mg⁺, Fe⁺, Cr⁺, Zn⁺, In⁺, Ag⁺, Cd⁺, Sn⁺, Sm⁺, Hg⁺, S⁺, P⁺, As⁺, Se⁺, Te⁺, etc. have been extracted. The total beam current ranges from several hundred microamperes to the order of milliamperes. The useful fraction of ion in total beam is 70—90%. The life of the source ranges from 40 to more than 100 hours.The basic structure and operating characteristics of the source are mainly discussed in this paper.