Development of Synchrotron Radiation X-Ray Grazing Incident Diffraction Method

JIANG XiaoMing; JIA QuanJie; ZHENG WenLi; LIU Peng; XIAN DingChang; JIANG ZuiMin; WANG Xun

Chinese Physics C> 2000, Vol. 24> Issue(12) : 1185-1190

Development of Synchrotron Radiation X-Ray Grazing Incident Diffraction Method

Institute of High Energy Physics, CAS, Beijing 100039, China1 Surface Physics National Key Lab., Fudan University, Shanghai 200433, China

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Abstract：
Synchrotron radiation X-ray grazing incident diffraction (GID) method was developed based on the five-circle diffractometer in the Diffuse Scattering Station at Beijing Synchrotron Radiation Facility. The lateral strain induced by the Ge/Si quantum dotswas measured successfully, which showed the capability of the GID method in measuring weak signals from surface structures. The results showed that the formation of Ge/Si quantum dots caused both the lateral expansion-strain and contraction-strain in the surface layer of Si(001) substrate.

References

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Parratt L G. Phys. Rev., 1954,95:359 2 Dosch H. Phys. Rev., 1987, B35:2137 3 Fuoss P H, LIANG K S, Eisenberger P. In: Synchrotron Radiation Research– Advances in Surface and Interface Science. Bachrach R Z ed. New York: Plenum Press, 1992. 1:385 4 JIANG XiaoMing. Physics (in Chinese), 1996, 25:623–627(姜晓明.物理,1996,25:623–627)5 JIANG XiaoMing, JING YuHui, ZHENG WenLi et al. High Energy Phys. and Nucl. Phys. (in Chinese), 1996,20:460–467(姜晓明,景毓辉,郑文莉等.高能物理与核物理,1996,20:460–467)6 JIANG X, ZHENG W, WU J et al. Rev. Sci. Instrum., 1995, 66: 1694 – 1695;ZHENG WenLi, JIANG XiaoMing,JING YuHui et al. Nucl. Instr. Methods, 1997, B129:543–5477 ZHU HaiJun, JIANG ZuiMin. Progress in Natural Science (in Chinese), 1998,8: 122(朱海军,蒋最敏.自然科学进展,1998,8:122)

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JIANG XiaoMing, JIA QuanJie, ZHENG WenLi, LIU Peng, XIAN DingChang, JIANG ZuiMin and WANG Xun. Development of Synchrotron Radiation X-Ray Grazing Incident Diffraction Method[J]. Chinese Physics C, 2000, 24(12): 1185-1190.

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Received: 1999-12-23
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

Development of Synchrotron Radiation X-Ray Grazing Incident Diffraction Method

Corresponding author: JIANG XiaoMing,

Institute of High Energy Physics, CAS, Beijing 100039, China1 Surface Physics National Key Lab., Fudan University, Shanghai 200433, China

Received Date: 1999-12-23
Accepted Date: 1900-01-01
Available Online: 2000-12-05

Abstract: Synchrotron radiation X-ray grazing incident diffraction (GID) method was developed based on the five-circle diffractometer in the Diffuse Scattering Station at Beijing Synchrotron Radiation Facility. The lateral strain induced by the Ge/Si quantum dotswas measured successfully, which showed the capability of the GID method in measuring weak signals from surface structures. The results showed that the formation of Ge/Si quantum dots caused both the lateral expansion-strain and contraction-strain in the surface layer of Si(001) substrate.