Studies on Wehnelt of Electron-Beam Accelerator

YIN Ming; ZHOU Xiao-Yan

Chinese Physics C> 2005, Vol. 29> Issue(3) : 301-304

Studies on Wehnelt of Electron-Beam Accelerator

YIN Ming ^, ,
ZHOU Xiao-Yan

School of Control Science and Engineering,Electron-Beam Laboratory,Shandong University,Jinan 250061,China2 School of Information Science and Engineering,Shandong University,Jinan 250061,China

Abstract
HTML
Reference
Related

PDF

Abstract：
Electron beam can be focused into a small spot with the diameter of only about nanometers theoretically,and easily controlled.It cannot be replaced by any other micro fabrication techniques in mask-making of VLSI (Very Large-Scale Integration).Based on the electron gun of SDS-3 electron beam lithography machine,the concave hyperboloid Wehnelt(oxide-coated cover)of accelerator is discussed.The electron trajectories and potential distribution are given.Electrons from the gun accelerated by a high voltage reached a target　of silicon piece(In front of the aperture)via the Wehnelt.Finally,spots of E-beam in the silicon piece and the geometry schematics for Wehnelt of accelerator are given.

References

[1]

. YIN Ming, SUN Xiao-jun. HEP NP, 2004, 28( 4) : 304 -307(in Chinese)(尹明,孙晓军,高能物理与核物理,2004, 28(4):304-307)2. WANG Jun-Hua, SHEN Lian-Guan, WANG Gui-Cheng et al . HEP NP, 2001, 25( 11) : 1120-1127 (in Chinese)(王绮华,沈连官,王贵诚等,高能物理与核物理,2001,25(11):1120-1127 )3. Yamagat e Y, Mihara S, Nishioki N. IEEE MEMS, 1996, 48: 307-3114. Dewolf P, Brazel E. Sol id Stat e Technology, 2000, 38( 9) : 117-1255. Bakharaen A A, Nurgazizon N I. Surface Science, 2001, 482-485:1319. 13246. ZHANG Yong-Hui , CHEN Hong-Bin, KANG Qiang.HEP NP, 2002,26( 8) : 876-879(in Chinese)(张永辉,陈洪斌,康强.高能物理与核物理, 2002, 26 ( 8 ) : 876-879)7. WANG Shu-Hong, WANG Jiu-Qing, YE Qiang. HEP NP, 2002, 26( 12) : 1302(in Chinese)(王书鸿,王九庆,叶强.高能物理rJJ核物理,2002,26(12):1302)8. Pfeiffer H C. Vac Sci Technology, 1999, B17( 11/ 12) : 2566-25769. Fritz. Sience, 2000, 288: 316-32210. Wada Y. Microelectronics, 1998, 29: 601-61111. YIN Ming, ZHANG Yu-lin. Acta Optica Sinica, 2004, 24 ( 3) : 423-426 (in Chinese)(尹明,张玉林.光学学报,2004,24(3):423-426 )

[1]	GUO Yun-Jun , HE Kang-Lin . Muon Identification Using the Efficiencies Ratio Method at BESⅡ. Chinese Physics C, 2007, 31(11): 1050-1055.
[2]	HUANG Wen-Xue , WANG Yue , ZHU Zhi-Chao , TIAN Yu-Lin , XU Hu-Shan , SUN Zhi-Yu , XIAO Guo-Qing , ZHAN Wen-Long . Experimental Study of the High-Voltage Breakdown and Simulations for the RFQ Cooler and Buncher RFQ1L. Chinese Physics C, 2006, 30(S2): 261-264.
[3]	HU Xi-Duo , SHAO Ming-Zhu , LUO Shi-Yu , LIU Yong-Sheng , ZHU De-Hai . Average Field Idea and Single Particle Model for 2 Dimension Crystallization Beams(Ⅱ). Chinese Physics C, 2004, 28(2): 196-199.
[4]	LI Ming-Liang , ZHU Sheng-Jiang , CHE Xing-Lai , YU Ying-Nan . Research on Two-Quasiparticle Bands in ⁹⁸Sr. Chinese Physics C, 2004, 28(S1): 75-77.
[5]	Yang Jianjun , Ma Boqiang , Li Guanglie . Non-perturbative Quark Propagator and the Study of the Non-trivial Q² Dependence in the Nucleon Structure Functions. Chinese Physics C, 1997, 21(2): 146-156.
[6]	Xu Jianming . Matching Problem of Lattice with Transverse Coupling. Chinese Physics C, 1995, 19(1): 73-81.
[7]	BES Collaboration . Experimental Study of Resonance f₂(1270) in the J/ψ Hadronic Decay. Chinese Physics C, 1993, 17(2): 97-106.
[8]	WANG Man , LI Jin , CUI Xiang-Zong , XIA Xiao-Mi , LAI Yuan-Fen , YAO Xiao-Guang . PROTOTYPE OF END CAP SHOWER COUNTERAND ITS BEAM TEST. Chinese Physics C, 1987, 11(3): 321-326.
[9]	Sa Ben-hao , Zhang Xi-zhen , Li Zhu-xia , Shi Yi-jin . A PRIMARY RESEARCH OF THE PHONON RENORMALIZATION OF NUCLEAR FIELD THEORY. Chinese Physics C, 1980, 4(3): 398-400.

Access

Get Citation

YIN Ming and ZHOU Xiao-Yan. Studies on Wehnelt of Electron-Beam Accelerator[J]. Chinese Physics C, 2005, 29(3): 301-304.

YIN Ming and ZHOU Xiao-Yan. Studies on Wehnelt of Electron-Beam Accelerator[J]. Chinese Physics C, 2005, 29(3): 301-304. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2004-06-21
Revised: 1900-01-01

Article Metric

Article Views(3780)
PDF Downloads(600)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Studies on Wehnelt of Electron-Beam Accelerator

YIN Ming ^,
ZHOU Xiao-Yan

Corresponding author: YIN Ming,

School of Control Science and Engineering,Electron-Beam Laboratory,Shandong University,Jinan 250061,China2 School of Information Science and Engineering,Shandong University,Jinan 250061,China

Received Date: 2004-06-21
Accepted Date: 1900-01-01
Available Online: 2005-03-05

Abstract: Electron beam can be focused into a small spot with the diameter of only about nanometers theoretically,and easily controlled.It cannot be replaced by any other micro fabrication techniques in mask-making of VLSI (Very Large-Scale Integration).Based on the electron gun of SDS-3 electron beam lithography machine,the concave hyperboloid Wehnelt(oxide-coated cover)of accelerator is discussed.The electron trajectories and potential distribution are given.Electrons from the gun accelerated by a high voltage reached a target　of silicon piece(In front of the aperture)via the Wehnelt.Finally,spots of E-beam in the silicon piece and the geometry schematics for Wehnelt of accelerator are given.