New Soft X-Ray Reflectometer on Beijing Synchrotron Radiation Facility and Some Basic Results of Physics Work

Cui Mingqi; Wang Jun; Miao Jianwei; Huang Yuying; Tang Esheng; Xian Dingchang; Shao Jinghong; Xue Song; Xu Zhengliang; Sun Jianhui

Chinese Physics C> 1995, Vol. 19> Issue(1) : 82-86

New Soft X-Ray Reflectometer on Beijing Synchrotron Radiation Facility and Some Basic Results of Physics Work

Institute of High Energy Physics, The Chinese Academy of Sciences, Beijing 1000391 Changchun Institute of Optics and Fine Mechanics, Academia Sinica, Changchun 130022

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Abstract：
This paper describes the new soft X-ray reflectometer with multilayer monochromator on beam line 3B1 of Beijing Synchrotron Radiation Facility (BSRF). The transmitted spectrum of aluminum filter and reflected spectrum of Nb/Si multilayer in soft X-ray region have been analysed with this reflectometer. The reflectivity of a Nb/Si multilayer manufactured in our group (41 layers, d = 13.45 and wavelength near 17.59um at 42 deg.) has been measured to be 32%.

References

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E.Spilleretal.,Optical Engineering,Vol.30（1991）1008.[2]Jon M.Slaughter and Charles M.Falca,NIM A319（1992）63.[3]崔明启缪建伟等，多层膜反射率研究初探，第一次两岸同步辐射学术研讨会论文集，北京（1993.10.）,p360.[4]J.L.Cao,The Current Studies of Soft X-ray Multilayer in CIOM,Proc.of the Sino-Japan-Symposium on Engineering Optics Beijng（1992.10）,p193.

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Cui Mingqi, Wang Jun, Miao Jianwei, Huang Yuying, Tang Esheng, Xian Dingchang, Shao Jinghong, Xue Song, Xu Zhengliang and Sun Jianhui. New Soft X-Ray Reflectometer on Beijing Synchrotron Radiation Facility and Some Basic Results of Physics Work[J]. Chinese Physics C, 1995, 19(1): 82-86.

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Received: 1900-01-01
Revised: 1900-01-01

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