Self-calibration of Silicon Photodiode in the Soft X Ray Spectral Range

  • Self-calibration experiment of silicon photodiodes in the soft X-ray spectral region of synchrotron radiation (50—2000eV) is carried out. Because of elimination of “dead region” and adoption of very thin SiO2 layer as window of the silicon photodiode, a simple model can be used to analyze the process. Based on parameters measured by experiment, the quantum efficiency of the silicon photodiode is calculated, and the flux of incident synchrotron radiation is also obtained.
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  • [1] Korde R,Canfield L R.SPIE.,1989,1140:126—132[2] CUI CongWu,CUI MingQi,YI RongQing.High Energy Phys.and Nucl.Phys.(inChinese),1998,22(2):180—185(崔聪悟,崔明启,易荣清.高能物理与核物理,1998,22(2):180—185)[3] Absolute XUV Silicon Photodiodes.Product Manual of IRD,Inc.[4] Krumrey M,Tegeler E.Rev.Sci.Instrum.,1992,63(1):797—801[5] Korde R,Cable J S,Canfield L R.IEEE Tran.Nucl.Sci.,1993,40(6):1655—1659[6] DENG Jian et al.Annual Report of National Hi–Tech 863–416–4.3.1Project(in Chinese),1997.69—80(邓健等.国家高技术863–416–4.3.1课题97年度进展报告,1997.69—80)[7] Korde R,Geist J.Appl.Opt.,1989,26:5284—5290[8] Gullikson E M et al.J.Elec.Spec.Rel.Phen.,1996,80:313—316[9] CUI MingQi et al.Atomic Energy Sci.Tech.(in Chinese),1998,32(6):492—498(崔明启等.原子能科学技术,1998,32(6):492—498)[10] NIST Report of Calibration,1996,Ref:P.O.JS 083A
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ZHANG DongQing, CUI MingQi, ZHU PeiPing, ZHAO YiDong and CUI CongWu. Self-calibration of Silicon Photodiode in the Soft X Ray Spectral Range[J]. Chinese Physics C, 2000, 24(6): 578-584.
ZHANG DongQing, CUI MingQi, ZHU PeiPing, ZHAO YiDong and CUI CongWu. Self-calibration of Silicon Photodiode in the Soft X Ray Spectral Range[J]. Chinese Physics C, 2000, 24(6): 578-584. shu
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Received: 1999-04-07
Revised: 1900-01-01
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Self-calibration of Silicon Photodiode in the Soft X Ray Spectral Range

    Corresponding author: ZHANG DongQing,
  • Institute of High Energy Physics, The Chinese Academy of Sciences, Beijing 100039,China

Abstract: Self-calibration experiment of silicon photodiodes in the soft X-ray spectral region of synchrotron radiation (50—2000eV) is carried out. Because of elimination of “dead region” and adoption of very thin SiO2 layer as window of the silicon photodiode, a simple model can be used to analyze the process. Based on parameters measured by experiment, the quantum efficiency of the silicon photodiode is calculated, and the flux of incident synchrotron radiation is also obtained.

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