A Method for Experimental Determination of the Sensitive Volume Thickness

LU Xiu-Qin; LIU Jian-Cheng; GUO Ji-Yu; ZHANG Qing-Xiang; HUANG Zhi; ZHANG Zhen-Long; GUO Gang; SHEN Dong-Jun; HUI Ning; NI Mei-Nan; KONG Fu-Quan; HAN Jian-Wei

Chinese Physics C> 2004, Vol. 28> Issue(S1) : 102-104

A Method for Experimental Determination of the Sensitive Volume Thickness

China Institute of Atomic Energy, Beijing 102413, China2 Centen for Space Science and Application Reseach, The Chinese Academy of Sciences, Beijing 100080, China

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Abstract：
A method of experimental determination of the sensitive volume(S_v)thickness d of micro-electronic devices is presented. It is based upon the deconvolution of the functions of heavy ion upset cross sections versus the range of the incidentions σ_seu(r), measured by varying the ion energy, and LET(r). The measured σ_seu(LET) and d can be used for accurate prediction of the rate of Single Event Effects (SEE) in space.

References

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. McNulty P J, Abdel-Kader W G, Farrel G E. Radiat. Phys. Chem., 1994, 43: 139-1492.Barak J, Levinson J, Akkerman A et al. Proc. 3rd RADECS Conf., 1995, 431-4363.Roth D.R, McNulty P J, Abdel-Kader W G et al. IEEE Trans. Nucl. Sci., 1993, 40: 17214.Beauvais J, McNulty P J, Abdel-Kader W G et al. Proc. 2rd RADECS Conf., 1993, 5405.Zoutendyk J A, Smith L S, Soli G A. et al. IEEE Trans. Nucl. Sci., 1985, 32: 4164-4169; McNulty P J, Beauvais W J, Roth D R. IEEE Trans. Nucl. Sci., 1991, 38: 14636.Barak J, Levinson J, Akkerman A et al. Proc. 3rd RADECS Conf., 1995, 321-3257.EcoRet R, Duzellier S, Barak J et al. Proc. 4rd RADECS Conf., 1997, 5768.EcoRet R, Duzellier S. IEEE Trans. Nucl. Sci. 1997,44(6): 2378-23859.Inguimbert C et al. IEEE Trans. Nucl. Sci., 2000, 47(3):551-55810.LU Xiu-Qin et al. NUCL. TECH., 2003, 26(4): 271-274(in Chinses)(路秀琴等,核技术,2003,26(4):271-274

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LU Xiu-Qin, LIU Jian-Cheng, GUO Ji-Yu, ZHANG Qing-Xiang, HUANG Zhi, ZHANG Zhen-Long, GUO Gang, SHEN Dong-Jun, HUI Ning, NI Mei-Nan, KONG Fu-Quan and HAN Jian-Wei. A Method for Experimental Determination of the Sensitive Volume Thickness[J]. Chinese Physics C, 2004, 28(S1): 102-104.

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Received: 2004-12-30
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

A Method for Experimental Determination of the Sensitive Volume Thickness

Corresponding author: LU Xiu-Qin,

China Institute of Atomic Energy, Beijing 102413, China2 Centen for Space Science and Application Reseach, The Chinese Academy of Sciences, Beijing 100080, China

Received Date: 2004-12-30
Accepted Date: 1900-01-01
Available Online: 2004-04-02

Abstract: A method of experimental determination of the sensitive volume(S_v)thickness d of micro-electronic devices is presented. It is based upon the deconvolution of the functions of heavy ion upset cross sections versus the range of the incidentions σ_seu(r), measured by varying the ion energy, and LET(r). The measured σ_seu(LET) and d can be used for accurate prediction of the rate of Single Event Effects (SEE) in space.