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Chinese Physics C> 2007, Vol. 31> Issue(S1) : 66-69 

Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source

  •  Institut fur Allgemeine Physik, Vienna University of Technology, Vienna 1040, Austria2 Institut fur Atom- und Molekulphysik, Justus-Liebig University, Giessen 35390, Germany

  • A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed, with the plasma-confining magnetic field produced exclusively by permanent magnets. Microwave power of up to 175W in the frequency range from 12.75 to 14.5GHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner. The waveguide coupling system serves also as biased electrode, and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas-mixing mode. A triode extraction system sustains ion acceleration voltages between 1kV and 10kV. The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.
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E.Galutschek1, E.Salzborn2, F.Aumayr1 and HP.Winter1. Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source[J]. Chinese Physics C, 2007, 31(S1): 66-69.
E.Galutschek1, E.Salzborn2, F.Aumayr1 and HP.Winter1. Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source[J]. Chinese Physics C, 2007, 31(S1): 66-69. shu
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Received: 2007-05-30
Revised: 1900-01-01
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Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source

  • Institut fur Allgemeine Physik, Vienna University of Technology, Vienna 1040, Austria2 Institut fur Atom- und Molekulphysik, Justus-Liebig University, Giessen 35390, Germany
  • Received Date: 2007-05-30
  • Accepted Date: 1900-01-01
  • Available Online: 2007-01-03

Abstract: A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed, with the plasma-confining magnetic field produced exclusively by permanent magnets. Microwave power of up to 175W in the frequency range from 12.75 to 14.5GHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner. The waveguide coupling system serves also as biased electrode, and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas-mixing mode. A triode extraction system sustains ion acceleration voltages between 1kV and 10kV. The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.

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