Calculation of Extraction System of Ion Sources

CHEN Li-Hua; CUI Bao-Qun; JIANG Wei-Sheng; LI Ai-Ling

Chinese Physics C> 2008, Vol. 32> Issue(S1) : 304-306

Calculation of Extraction System of Ion Sources

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Abstract：
In order to extract parallel beam from ion sources, it's necessary to design suitable electrode configurations in extraction zone. Taking the effect of the space-charge into account, the electrode configurations should vary with beam current density. A means of calculating extraction configuration of parallel beam with certain current density has been evolved from the space-charge limited current. By solving Poisson equation and Laplace equation, the potential distribution close to the strip beam has been gotten.

References

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. ZHANG Yi-Chen. The Technique of Electron Gun and Ion Beam. Beijing: Metallurgical Industry Press, 2004. 49-57(in Chinese)(张以忱. 电子枪与离子束技术. 北京: 冶金工业出版社, 2004. 49—57)2. YU Qing-Chang. The Theory of High Current Ion Optics. Beijing: Atomic Energy Press, 1982. 75(in Chinese)(郁庆长. 强流离子光学原理. 北京: 原子能出版社, 1982. 75)3. Nagy G A, Szilagyi M (1974). Introduction to the Theory of Space-Charge Optics. Mo Yun-long et al. Beijing: Science Press, 1983. 118-127(in Chinese)(G. A. 纳吉, M. 西拉支(1974). 空间电荷光学导论. 莫云龙等. 北京: 科学出版社, 1983. 84-85 118-127)4. Pierce J R. J. Appl. Phys., 1940, 11: 548-5545. Daykin P N. Brit. J. Appl. Phys., 1954, 6(7): 248-2506. Radley D E. J. Electron. Control, 1958, 4(2): 125-148

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CHEN Li-Hua, CUI Bao-Qun, JIANG Wei-Sheng and LI Ai-Ling. Calculation of Extraction System of Ion Sources[J]. Chinese Physics C, 2008, 32(S1): 304-306.

CHEN Li-Hua, CUI Bao-Qun, JIANG Wei-Sheng and LI Ai-Ling. Calculation of Extraction System of Ion Sources[J]. Chinese Physics C, 2008, 32(S1): 304-306. shu

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Received: 2008-01-11
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

Calculation of Extraction System of Ion Sources

Corresponding author: CHEN Li-Hua,

Received Date: 2008-01-11
Accepted Date: 1900-01-01
Available Online: 2008-01-04

Abstract: In order to extract parallel beam from ion sources, it's necessary to design suitable electrode configurations in extraction zone. Taking the effect of the space-charge into account, the electrode configurations should vary with beam current density. A means of calculating extraction configuration of parallel beam with certain current density has been evolved from the space-charge limited current. By solving Poisson equation and Laplace equation, the potential distribution close to the strip beam has been gotten.