Experimental study on TiN coated racetrack-type ceramic pipe

WANG Jie; XU Yan-Hui; ZHANG Bo; WEI Wei; FAN Le; PEI Xiang-Tao; HONG Yuan-Zhi; WANG Yong

doi:10.1088/1674-1137/39/11/117005

Chinese Physics C> 2015, Vol. 39> Issue(11) : 117005 DOI: 10.1088/1674-1137/39/11/117005

Experimental study on TiN coated racetrack-type ceramic pipe

1.
National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

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Abstract：
TiN film was coated on the internal surface of a racetrack-type ceramic pipe by three different methods: radio-frequency sputtering, DC sputtering and DC magnetron sputtering. The deposition rates of TiN film under different coating methods were compared. The highest deposition rate was 156 nm/h, which was obtained by magnetron sputtering coating. Based on AFM, SEM and XPS test results, the properties of TiN film, such as film roughness and surface morphology, were analyzed. Furthermore, the deposition rates were studied with two different cathode types, Ti wires and Ti plate. According to the SEM test results, the deposition rate of TiN/Ti film was about 800 nm/h with Ti plate cathode by DC magnetron sputtering. Using Ti plate cathode rather than Ti wire cathode can greatly improve the film deposition rate.
- TiN ,
- ceramic vacuum chamber ,
- Ti cathode

References

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WANG Jie, XU Yan-Hui, ZHANG Bo, WEI Wei, FAN Le, PEI Xiang-Tao, HONG Yuan-Zhi and WANG Yong. Experimental study on TiN coated racetrack-type ceramic pipe[J]. Chinese Physics C, 2015, 39(11): 117005. doi: 10.1088/1674-1137/39/11/117005

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Received: 2015-01-16
Revised: 2015-05-31

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Supported by National Nature Science Foundation of China (11075157)

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Experimental study on TiN coated racetrack-type ceramic pipe

Corresponding author: WANG Yong,

1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

Received Date: 2015-01-16
Accepted Date: 2015-05-31
Available Online: 2015-11-20

Fund Project: Supported by National Nature Science Foundation of China (11075157)

Abstract: TiN film was coated on the internal surface of a racetrack-type ceramic pipe by three different methods: radio-frequency sputtering, DC sputtering and DC magnetron sputtering. The deposition rates of TiN film under different coating methods were compared. The highest deposition rate was 156 nm/h, which was obtained by magnetron sputtering coating. Based on AFM, SEM and XPS test results, the properties of TiN film, such as film roughness and surface morphology, were analyzed. Furthermore, the deposition rates were studied with two different cathode types, Ti wires and Ti plate. According to the SEM test results, the deposition rate of TiN/Ti film was about 800 nm/h with Ti plate cathode by DC magnetron sputtering. Using Ti plate cathode rather than Ti wire cathode can greatly improve the film deposition rate.