Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

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Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J]. Chinese Physics C, 1994, 18(1): 13-19.
Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J]. Chinese Physics C, 1994, 18(1): 13-19. shu
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Received: 1900-01-01
Revised: 1900-01-01
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Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

    Corresponding author: Wang Jun,
  • Institute of High Energy Physics,Beijing 100039

Abstract: W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.

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