Thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films for the hot slumping technique

Shuang Ma; Ming-Wu Wen; Zhan-Shan Wang

doi:10.1088/1674-1137/40/7/079001

Chinese Physics C> 2016, Vol. 40> Issue(7) : 079001 DOI: 10.1088/1674-1137/40/7/079001

Thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films for the hot slumping technique

1.
MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

Abstract
HTML
Reference
Related

PDF

Abstract：
The thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films are studied in this paper. Several types of adhesion layers were investigated:10.0 nm Pt, 1.5 nm Cr+50.0 nm Pt, 2.5 nm Cr+50.0 nm Pt and 3.5 nm Cr+50.0 nm Pt fabricated using direct current magnetron sputtering. The variation of layer thickness, roughness, crystallization and surface topography of Pt/Cr films were analyzed by grazing incidence X-ray reflectometry, large angle X-ray diffraction and optical profiler before and after heating. 2.5 nm Cr+50.0 nm Pt film exhibits the best thermal stability and separation characteristics according to the heating and hot slumping experiments. The film was also applied as an anti-sticking layer to optimize the maximum temperature of the hot slumping technique.
- hot slumping technique ,
- anti-sticking layers ,
- Pt/Cr film ,
- thermal stability ,
- separation characteristic

References

[1]	J. E. Koglin, C. M. Chen, J. C. Chonko et al, Proc. SPIE, 5488(46):1-12(2004)
[2]	J. E Koglin, F. E. Christensen, W. W. Craig et al, Proc. SPIE, 5900X:1-10(2005)
[3]	D. Spiga, V. Cotroneo, S. Basso et al, Astron. Astrophys., 505(1):373-384(2009)
[4]	P. Conconi, S. Campana, G. Tagliaferri et al, Monthly Notices of the Royal Astronomical Society, 405(2):877-886(2010)
[5]	D. Spiga, Astron. Astrophys., 529:A18(2011)
[6]	F. Frassetto, S. Coraggia, P. Miotti et al, Opt. Express, 21(15):18290-18303(2013)
[7]	H. Awaki, H. Kunieda, M. Ishida et al, Appl. Opt., 53(32):7664-7676(2014)
[8]	L. Raimondi, D. Spiga, Astron. Astrophys., 573:A22(2015)
[9]	K. S. Chon, Y. Namba, K. H. Yoon, Appl. Opt., 45(19):4609-4616(2006)
[10]	H. Wolter, Annalen der Physik, 445(1-2):94-114(1952)
[11]	M. C. Weisskopf, S. L. O'Dell, R. F. Elsner et al, Proc. SPIE, 2515:312-329(1995)
[12]	O. Citterio, P. Conconi, M. Ghigo et al, Proc. SPIE, 1742:256-263(1993)
[13]	P. J. Serlemitsos, Y. Soong, K. W. Chan et al, Publications of the Astronomical Society of Japan, 59(sp1):S9-S21(2007)
[14]	W. W. Zhang, D. A. Content, S. J. Henderson et al, Proc. SPIE, 5488:820-828(2004)
[15]	W. W. Zhang, J. Bolognese, K. W. Chan et al, Proc. SPIE, 668802:1-12(2007)
[16]	M. Ghigo, S. Basso, R. Canestrari et al, Proc. SPIE, 74370P:1-15(2009)
[17]	W. W. Zhang, J. Bolognese, G. Byron et al, Proc. SPIE, 73600J:1-10(2009)
[18]	M. Civitani, S. Basso, A. Bianco et al. Int. Conference on Space Optics, 4:8(2010)
[19]	G. Pareschi, S. Basso, M. Bavdaz et al, Proc. SPIE, 81470L (2011)
[20]	W. W. Zhang, M. P. Biskach, P. N. Blake et al, Proc. SPIE, 81470K:1-12(2011)
[21]	W. W. Zhang, Proc. SPIE,74370N:1-11(2009)
[22]	Proserpio L. Development of the glass slumping technology for the production of the X-ray mirrors aboard the international X-ray observatory optical module, Ph. D. Thesis, (Universit degli Studi dell'Insubria, 2011)
[23]	Y. Dong, Proc. SPIE, 91443O:1-7(2014)
[24]	Z. Wang, Z. Shen, B. Mu et al, Proc. SPIE, 91441E:1-6(2014)
[25]	S. Romaine, R. Bruni, P. Gorenstein et al, Proc. SPIE, 77323T:1-6(2010)

[1]	Fufang Wen , Jacob Bryon , Liwen Wen , Gang Wang . Event-shape-engineering study of charge separation in heavy-ion collisions. Chinese Physics C, 2018, 42(1): 014001. doi: 10.1088/1674-1137/42/1/014001
[2]	Peng-Cheng Li , Hong-Fei Zhang , Yong-Jia Wang . Stability of super heavy nuclei associated with the updated nuclear data. Chinese Physics C, 2017, 41(11): 114103. doi: 10.1088/1674-1137/41/11/114103
[3]	Mian Yu , Hui-Ling Wei , Yi-Dan Song , Chun-Wang Ma . Experimental determination of one-and two-neutron separation energies for neutron-rich copper isotopes. Chinese Physics C, 2017, 41(9): 094001. doi: 10.1088/1674-1137/41/9/094001
[4]	M. Ismail , A. Y. Ellithi , A. Adel , Hisham Anwer . Islands of stability and quasi-magic numbers for super-and ultra-heavy nuclei. Chinese Physics C, 2016, 40(12): 124102. doi: 10.1088/1674-1137/40/12/124102
[5]	Jue Zhang , Shun Zhou . Electroweak vacuum stability and diphoton excess at 750 GeV. Chinese Physics C, 2016, 40(8): 081001. doi: 10.1088/1674-1137/40/8/081001
[6]	WAN Bo , ZHANG Xue-Ying , CHEN Liang , GE Hong-Lin , MA Fei , ZHANG Hong-Bin , JU Yong-Qin , ZHANG Yan-Bin , LI Yan-Yan , XU Xiao-Wei . Digital pulse shape discrimination methods for n-γ separation in an EJ-301 liquid scintillation detector. Chinese Physics C, 2015, 39(11): 116201. doi: 10.1088/1674-1137/39/11/116201
[7]	ZHAO Tian-Xing , FENG Ya-Juan , HUANG Jun-Heng , HE Jin-Fu , LIU Qing-Hua , PAN Zhi-Yun , WU Zi-Yu . Local structure and optical absorption characteristic investigationon Fe doped TiO₂ nanoparticles. Chinese Physics C, 2015, 39(2): 028001. doi: 10.1088/1674-1137/39/2/028001
[8]	LIU Bo , LIU Ran , LI Quan-Jun , YAO Ming-Guang , ZOU Bo , CUI Tian , LIU Bing-Bing , LIU Jing . Study of high pressure structural stability of CeO₂ nanoparticles. Chinese Physics C, 2013, 37(9): 098003. doi: 10.1088/1674-1137/37/9/098003
[9]	B. Spataro , A. Marcelli , S. Sarti , V. A. Dolgashev , S. Tantawi , A. D. Yeremian , M. G. Grimaldi , L. Romano , F. Ruffino , R. Parodi , G. Cibin , C. Marrelli , M. Migliorati , C. Caliendo0 . Molybdenum sputtering film characterization for high gradient accelerating structures. Chinese Physics C, 2013, 37(9): 097005. doi: 10.1088/1674-1137/37/9/097005
[10]	TANG Liang , LI Xue-Qian . Discussions on the stability of diquarks. Chinese Physics C, 2012, 36(7): 578-584. doi: 10.1088/1674-1137/36/7/002
[11]	GUAN Liang , TANG Hao-Hui , GUO Jun-Jun , WANG Xiao-Lian , XU Zi-Zong , ZHAO Tian-Chi . Micromegas prototypes with thermo-bond film separators. Chinese Physics C, 2011, 35(2): 163-168. doi: 10.1088/1674-1137/35/2/011
[12]	FENG Zhao-Yang , ZHANG Yi , LIU Cheng , FAN Chao , LI Hong-Chao , WANG Bo , WU Han-Rong , HU Hong-Bo , LU Hong , TAN You-Heng . Study on the separation of 100 TeV γ-rays from cosmic rays for the Tibet ASγ experiment. Chinese Physics C, 2011, 35(2): 153-157. doi: 10.1088/1674-1137/35/2/009
[13]	WANG Fang , LIN Lin , ZHANG He , HAO Jian-Kui , ZHANG Bao-Cheng , LIU Ke-Xin . Amplitude and phase stability studies in a DC superconducting injector. Chinese Physics C, 2011, 35(9): 855-858. doi: 10.1088/1674-1137/35/9/013
[14]	SU Nan , Jens O , Michael Strickland . Hard-thermal-loop QED thermodynamics. Chinese Physics C, 2010, 34(9): 1527-1529. doi: 10.1088/1674-1137/34/9/091
[15]	YU Zi , LIU Guang-Zhou , ZHU Ming-Feng , DING Wen-Bo , ZHAO En-Guang . Thermal protoneutron stars with hyperons. Chinese Physics C, 2009, 33(S1): 70-72. doi: 10.1088/1674-1137/33/S1/023
[16]	CHEN Hong-Fei , ZOU Ji-Qing , SHI Wei-Hong , ZOU Hong , HU Ran-Sheng , TIAN Da-Yu . Thermal experiment of silicon PIN detector. Chinese Physics C, 2008, 32(10): 820-824. doi: 10.1088/1674-1137/32/10/011
[17]	ZHANG Jun , WANG Xu-Fei , HU Zhi-Wen , CHEN Lian-Yun , WANG Xiao-Hua , LI Jun , CHEN Bin , HU Su-Hua , XU Ming-Liang , WU Li-Jun , YU Zeng-Liang . Single Particles Irradiating Scattergrams of China Map Profile Etched on CR-39 Film. Chinese Physics C, 2005, 29(7): 713-716.
[18]	OU Li , LIU Min , LI Zhu-Xia , LIU Ji-Feng . Thermal Stability Line for Hot Nuclei. Chinese Physics C, 2004, 28(11): 1160-1164.
[19]	He Yuanjin , Xin Mingrui , Zhang Tianbao . Measurement of Characteristic Positron Annihilation Lifetime in HgCdTe. Chinese Physics C, 1994, 18(S3): 315-319.
[20]	Chen Guoming , Chen Hesheng , Jin Bingnian , Tang Xiaowei , Tong Guoliang , Wu Yigen , Zhong Chongchang . e/π Separation Analysis from L3 Calorimeter Beam Test. Chinese Physics C, 1992, 16(S1): 1-10.

Access

Get Citation

Shuang Ma, Ming-Wu Wen and Zhan-Shan Wang. Thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films for the hot slumping technique[J]. Chinese Physics C, 2016, 40(7): 079001. doi: 10.1088/1674-1137/40/7/079001

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2015-09-30
Revised: 2015-02-06

Fund

Supported by CAS XTP project XDA04060605

Article Metric

Article Views(1643)
PDF Downloads(270)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films for the hot slumping technique

Corresponding author: Zhan-Shan Wang,

1. MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

Received Date: 2015-09-30

Accepted Date: 2015-02-06

Available Online: 2016-07-05

Fund Project: Supported by CAS XTP project XDA04060605

Abstract: The thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films are studied in this paper. Several types of adhesion layers were investigated:10.0 nm Pt, 1.5 nm Cr+50.0 nm Pt, 2.5 nm Cr+50.0 nm Pt and 3.5 nm Cr+50.0 nm Pt fabricated using direct current magnetron sputtering. The variation of layer thickness, roughness, crystallization and surface topography of Pt/Cr films were analyzed by grazing incidence X-ray reflectometry, large angle X-ray diffraction and optical profiler before and after heating. 2.5 nm Cr+50.0 nm Pt film exhibits the best thermal stability and separation characteristics according to the heating and hot slumping experiments. The film was also applied as an anti-sticking layer to optimize the maximum temperature of the hot slumping technique.

HTML

Reference (25)

Thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films for the hot slumping technique

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article